OST Photonics Fused Silica Wafers

Diameter

3”(76.2mm)

4” （100mm)

6"(150mm)

8"(200mm)

10”(250mm)

12”(300mm)

Diameter Tolerance(±)

≤0.20 mm

Thickness

≥0.1mm

≥0.1mm

≥0.3mm

≥0.4mm

≥0.5mm

≥0.5mm

Primary reference flat

According to our standards or your requests

LTV (5mmx5mm)

< 0.5µm

TTV

< 2µm

< 2µm

< 3µm

<3µm

<5µm

<5µm

Bow

±20µm

±20µm

±30µm

±40µm

±40µm

±40µm

Warp

≤ 30µm

≤ 30µm

≤ 40µm

≤ 50µm

≤ 50µm

≤ 50µm

PLTV(5mm*5mm)<0.4um

≥95%

≥95%

≥95%

≥95%

≥95%

≥95%

Edge Criteria

Compliant with SEMI M1.2 Standard/refer to IEC62276

Surface Type

Single side polished(SSP)/double sides polished(DSP)

Polished side Ra

≤0.5 nm

Back Side Criteria

General is 0.2-0.7µm or as customized

Packaging

25pcs per box

Thickness

≥0.05mm

Dimensional Tolerance

±25μm

Thickness Tolerance

±5μm

Thickness Variation(TTV)

< 2μm

Flatness

1/10 Wave/Inch

Surface Roughness (RMS)

<5Ǻ

Scratch and Dig

10/5

Particle Size

<10μm

Bow/Warp

<10μm